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DLI processes
Application guidelines
Application guidelines for DLI processes
Acronyms
What does DLI mean ?
Vaporization technologies
What are the advantages and drawbacks of the different vaporization technologies ?
Processes
Our DLI systems have been designed to offer the widest process versatility
Substrates
A wide range of substrates can be processed by DLI (Direct Liquid Injection) systems
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RTP / RTCVD processes
Application guidelines
Application guidelines for RTP and RTCVD processes
Acronyms
RTP processes
What are the differents types of RTP processes ?
RTCVD : Rapid Thermal Chemical Vapor Deposition Processes
Substrates
Widest range of substrates processed with our RTP/RTPCVD systems
R&D to production
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Products
Annealsys products
RTP and RTCVD
AS-Micro
Economical 3-inch Rapid thermal processing system
AS-One
Rapid Thermal Processing furnaces
AS-Premium
Rapid thermal processing system with square chamber
AS-Master
Rapid Thermal Processing / Rapid Thermal Chemical Vapor Deposition system.
Zenith-100
Far and Near – Up to one hour at 2000°C
DLI-CVD / DLI-ALD
MC-050
All in one DLI system
MC-100
Easy multi process capabilities reactor for R&D
MC-200
Climb to the 200 mm step
Veeco-ALD products
ALD
Savannah
Phoenix
ALD Plasma
Fiji
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