Jipelec JetLight 2-inch RTA system
The JetLight is a 2-inch rapid thermal annealing system with vacuum capability.
It is designed to provide a low cost solution for laboratories.
It is designed to provide a low cost solution for laboratories.
Rapid Thermal Annealing system
- Rapid Thermal Annealing (RTA)
- Implant annealing
- Ohmic contact annealing
- Rapid Thermal Oxidation (RTO)
- Densification and crystallization
- Diffusion of dopants
- Etc.
2-inch rapid thermal processor for universities
The JetLight is a compact table top two-inch rapid thermal processor with vacuum capability dedicated to research applications. It can process substrates from few square millimeters up to 2-inch diameter. Optional susceptors are available to hold small samples and to process substrates with low infrared absorption.
The quartz tube process chamber with stainless steel flanges and tubular infrared halogen lamps furnace allows running processes up to 1000?C.
The horizontal motion door with quartz tray provides easy access for loading and unloading of the wafers and thermocouple installation.