Process category
| Available systems |
Implant annealing
Ohmic contact annealing
Diffusion of dopants
Densification and crystallization | AS-Micro
AS-One
AS-Premium
AS-Master |
Implant annealing of silicon carbide | Zenith-100 |
Oxidation
Nitridation
Selenization | AS-Micro
AS-One
AS-Premium
AS-Master |
Silicon carbonization | AS-Master HT version |
RTCVD of graphene | AS-One, AS-Master, Zenith-100 |
Generation of graphene by sublimation | Zenith-100 |
RTCVD of graphene
RTCVD of hBN (hexagonal boron nitride) | AS-One
AS-Master |
RTCVD of poly silicon, epitaxial silicon, SiO2, SiNx | AS-Master RTCVD version |
