Application guidelines for RTP and RTCVD processes
Process category | Available systems |
Implant annealing | |
Implant annealing of silicon carbide | |
Thermal annealing of polymers | |
Oxidation | |
Silicon carbonization | AS-Master HT version |
RTCVD of graphene | |
Generation of graphene by sublimation | |
RTCVD of poly silicon, epitaxial silicon, SiO2, SiNx |