Substrates

The cold wall chamber technology and the extended temperature range of our Rapid Thermal Processing associated with optimized susceptors allow processing the widest range of substrates:
  • Silicon wafers
  • Compound semiconductor wafers
  • GaN/Sapphire wafers for LEDs
  • Silicon carbide wafers
  • Poly silicon wafers for solar cells
  • Glass substrates
  • Metals
  • Polymers