Annealsys, IN SEARCH OF EXCELLENCE

A wide range of substrates can be processed by DLI (Direct Liquid Injection) systems

The DLI system can process a wide range of materials:
  • Silicon wafers
  • Compound semiconductor wafers
  • Single crystals wafers
  • Silicon carbide wafers
  • Poly silicon wafers for solar cells
  • Glass substrates
  • Metals
  • Others