Our DLI machines have been designed to offer the widest process versatility. These machines can perform different types of processes inside the same chamber:
DLI-CVD, DLI-ALD, DLI pulse pressure CVD. The two-inch machine can in addition run infrared assisted ALD and CVD,
RTP,
RTCVD and MOCVD processes.
The applications are:
- Simple and multi-metallic oxides (see application notes)
- Nitrides, metals, and alloys
- 2D and 3D materials
- III-V, wide band gap semiconductors
- Etc.
Advantages and drawbacks of Direct Liquid Injection, Vapor draw, bubbler
