Our DLI machines have been designed to offer the widest process versatility. These machines can perform different types of processes inside the same chamber: DLI-CVD, DLI-ALD, DLI pulse pressure CVD. The two-inch machine can in addition run infrared assisted ALD and CVD, RTP, RTCVD and MOCVD processes.

The applications are:
  • Simple and multi-metallic oxides (see application notes)
  • Nitrides, metals, and alloys
  • 2D and 3D materials
  • III-V, wide band gap semiconductors
  • Etc.

Advantages and drawbacks of Direct Liquid Injection, Vapor draw, bubbler