Second-hand AS-One 150
Other Second Hand Systems products
This second hand AS-One 150 RTP system is perfect status. The system has been used for production for 15 years until our customer purchased a bigger RTP furnace to increase his production capacity.
The furnace is a 150 mm RTP tool with cold wall chamber and a temperature range up to 1200°C. It is equipped with a low temperature range pyrometer (up to 1100°C) but can be upgrade with a high temperature range pyrometer.
The machine has one purge gas line and one process gas line with mass flow controller and can receive 2 additional gas lines.
The machine has vacuum and high vacuum capability with a turbo pump (status of the pump to be confirmed).
It comes with full PC control.
Year: 2006
Availability: 12/08/2021
Actual location: Annealsys France