Economical 3-inch RTP system for laboratories and education.Dual chamber version to avoid cross contamination issues.
The AS-Micro is a compact table top three-inch rapid thermal processor with vacuum capability dedicated to research applications. It can process substrates from few square millimeters up to
Versatile Rapid Thermal Processing cold wall chamber furnaces. 4-inch (100 mm) and 6-inch (150 mm) versions.
The Annealsys AS-One system is available with two sizes of reactors to process substrates up to 100 mm (4”) or 150 mm (6”) diameter. The machine has been specially developed to meet the
RTP system with square chamber for substrates up to 156 mm x156 mm. Multiple system configurations.
The Annealsys AS-Premium system can process samples up to 156x156 mm² samples.
The reactor platform and the machine have been designed to accommodate a wide range of
Versatile 200 mm RTP/RTCVD system from Research to Production. From RT up to 1450°C down to 10-6 Torr. Extended RTCVD capabilities (option).
The Annealsys AS-Master Rapid Thermal Processor is a highly versatile tool allowing a wide range of processes from annealing to Rapid Thermal Chemical Vapor Deposition.