RTP and RTCVD

Our Rapid Thermal Processing (RTP) and Rapid Thermal CVD (RTCVD) systems can process samples from few mm² up to 200 mm diameter.
These versatile machines can performed a wide range of processes from contact annealing to chemical vapor deposition of graphene or h-BN.

See the three different classes of application of Rapid thermal process
Economical 3-inch Rapid thermal processing systemAS-Micro

Economical 3-inch Rapid thermal processing system

Economical 3-inch RTP system for laboratories and education.Dual chamber version to avoid cross contamination issues.

The AS-Micro is a compact table top three-inch rapid thermal processor with vacuum capability dedicated to research applications. It can process substrates from few square millimeters up to... Read more about AS-Micro


Rapid Thermal Processing furnacesAS-One

Rapid Thermal Processing furnaces

Versatile Rapid Thermal Processing cold wall chamber furnaces. 4-inch (100 mm) and 6-inch (150 mm) versions.

The Annealsys AS-One system is available with two sizes of reactors to process substrates up to 100 mm (4”) or 150 mm (6”) diameter. The machine has been specially developed to meet the... Read more about AS-One


Rapid thermal processing system with square chamberAS-Premium

Rapid thermal processing system with square chamber

RTP system with square chamber for substrates up to 156 mm x156 mm. Multiple system configurations.

The Annealsys AS-Premium system can process samples up to 156x156 mm² samples.

The reactor platform and the machine have been designed to accommodate a wide range of ... Read more about AS-Premium


Rapid Thermal Processing / Rapid Thermal Chemical Vapor Deposition system.AS-Master

Rapid Thermal Processing / Rapid Thermal Chemical Vapor Deposition system.

Versatile 200 mm RTP/RTCVD system from Research to Production. From RT up to 1450°C down to 10-6 Torr. Extended RTCVD capabilities (option).

The Annealsys AS-Master Rapid Thermal Processor is a highly versatile tool allowing a wide range of processes from annealing to Rapid Thermal Chemical Vapor Deposition.

... Read more about AS-Master