May. 13, 2015
Come to Annealsys Workshop Wednesday May 13 at 9h30 held during the E-MRS Spring meeting in Lille
From RTP to CVD and from CVD to ALD
Learn more about our solutions for RTP
and RTCVD and our multi process capability RTP
machines up to 2000°C.
Learn more about our solutions for CVD and ALD and our multi process capability DLI-CVD / DLI-ALD systems
Symposium C: Advanced inorganic materials and structures for photovoltaics.
Symposium M: Multifunctional binary and complex oxides films and nanostructures for nanoelectronics and energy applications - II