Jean-Manuel Decams holds a Ph.D in Chemistry in synthesis of chemical precursors for CVD from the University of Nice. He is R&D Manager at Annealsys and responsible for process development and cooperation research projects. He has been involved in many development projects for superconductor, metals and high-k materials deposition by MOCVD. He holds several patents and is associated to number of publications. He is co-inventor of state of the art direct liquid injection vaporization systems.