ELOGE




Description: Optimized electrolyte for 3D architecture (batteries)
Period: 2009-2011
Partners: Agence nationale de la recherche (ANR), CEA-DRT-LITEN, LMGP, Laboratoire Laplace, ST Microelectronics, Biophy Research
MC100

Description: Development of innovative 4-inch
MOCVD reactor
Period: 2006-2009
Partner: OSEO - Région Languedoc Roussillon
CRISILAL



Description: Silicon recristallisation for PV applications
Period: 2008-2009
Partners: Agence nationale de la recherche (ANR), CEA-DRT-LITEN, ULP-InESS, Imphy Alloys, Photowatt

Description: Development of 2-inch
MOCVD furnace with in-situ annealing capability
Period: 2008-2009
Partner: Transferts LR
AS-Master

Description: Development of a high temperature 200 mm
Rapid Thermal Processing system up to 1500°C
Period: 2005-2006
Partner: OSEO - Région Languedoc Roussillon
LC100
Description: 4-inch tubular furnace for annealing and
LPCVD processes
Period: 2005-2006
Partner: Région Languedoc Roussillon
AS-One
Description: Modelling of
RTP reactor
Period: 2004-2006
Partner: ENSAM Angers
AS-Micro

Description: Development of 3-inch
RTP system for laboratories
Period: 2004
Partner: Transferts LR, Région Languedoc Roussillon