Application guidelines for DLI processes
DLI processes acronyms
What does DLI mean ?
What are the advantages and drawbacks of the different vaporization technologies ?
Our DLI systems have been designed to offer the widest process versatility
A wide range of substrates can be processed by DLI (Direct Liquid Injection) systems
RTP / RTCVD processes
Application guidelines for RTP and RTCVD processes
Rapid Thermal Processing processes
What are the differents types of RTP processes ?
RTCVD : Rapid Thermal Chemical Vapor Deposition Processes
Widest range of substrates processed with our RTP/RTPCVD systems
R&D to production
RTP and RTCVD
Economical 3-inch Rapid thermal processing system
Rapid Thermal Processing furnaces for the development of rapid thermal annealing and CVD processes
Rapid thermal processing system with square chamber
Rapid Thermal Processing / Rapid Thermal Chemical Vapor Deposition system.
Far and Near – Up to one hour at 2000°C
DLI-CVD / DLI-ALD
All in one DLI system
Easy multi process capabilities reactor for R&D
Climb to the 200 mm step
Savannah the preferred system for university researchers worldwide involved in ALD
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