2-inch RTA System

Rapid Thermal Annealing System

• Rapid Thermal Annealing (RTA)
• Implant annealing
• Ohmic contact annealing
• Rapid Thermal Oxidation (RTO)
• Densification and crystallization
• Diffusion of dopants
• Etc…

2-inch rapid thermal processor for universities

The JetLight is a compact table top two-inch rapid thermal processor with vacuum capability dedicated to research applications. It can process substrates from few square millimeters up to 2-inch diameter. Optional susceptors are available to hold small samples and to process substrates with low infrared absorption.

The quartz tube process chamber with stainless steel flanges and tubular infrared halogen lamps furnace allows running processes up to 1000°C.

The horizontal motion door with quartz tray provides easy access for loading and unloading of the wafers and thermocouple installation.

Discover our other rapid thermal processing equipment :

• AS-Micro : 3 inch RTP system
• AS-One : RTA and CVD processes
• AS-Premium : double side heating RTP system
• AS-Master : 200 mm RTP system
• Jipelec Jetfirst : 300 mm RTP system
• Zenith Series : high temperature RTP furnace (2000°C)

See all our rapid thermal processing equipment