The Annealsys AS-Premium system can process samples up to 156x156 mm² samples.
The reactor platform and the machine have been designed to accommodate a wide range of configurations to meet customers’ requirements in terms of process.
The chamber can receive a single side or a double side lamp heating furnace. The design of the process chamber allows manual loading and the connection to a cluster tool or a glove box (options).
Pyrometer and thermocouple temperature control are standard features. The fast digital PID temperature controller provides high temperature reproducibility.
Graphite and silicon carbide coated graphite susceptors are available for processing of samples with encapsulation.