Montpellier, France, September 23, 2014
CLUSTER LINE CIGS is a cluster tool for the production of thin film solar cells. This equipment is the latest tool designed by Alliance Concept for photovoltaic applications. The substrate is transferred from one chamber to another without contamination thanks to a custom-designed vacuum robot.
The cluster tool is equipped with Annealsys cluster
RTP chamber
AS-One 200 developed in the frame of the Pro-CIGS project for the selenization annealing of square substrates up to 156 mm x 156 mm.
Cluster Line CIGS has been developed within the FUI project « Pro-CIGS » (supported by the Tenerrdis, Derbi and Mont-Blanc Industries clusters), in collaboration with Annealsys and CEA LITEN.
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