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Applications
- DLI processes
- Application guidelines Application guidelines for DLI processes
- Acronyms DLI processes acronyms
- What does DLI mean ?
- Vaporization technologies What are the advantages and drawbacks of the different vaporization technologies ?
- Processes Our DLI systems have been designed to offer the widest process versatility
- Substrates A wide range of substrates can be processed by DLI (Direct Liquid Injection) systems
- Support
- RTP / RTCVD processes
- Application guidelines Application guidelines for RTP and RTCVD processes
- Acronyms
- Rapid Thermal Processing processes What are the differents types of RTP processes ?
- RTCVD : Rapid Thermal Chemical Vapor Deposition Processes
- Substrates Widest range of substrates processed with our RTP/RTPCVD systems
- R&D to production
- Support
Products
- Annealsys RTP / RTCVD
- Jipelec JetLight 2-inch RTA system
- AS-Micro Economical 3-inch Rapid thermal processing system
- AS-One Rapid Thermal Processing furnaces for the development of rapid thermal annealing and CVD processes
- AS-Premium Rapid thermal processing system with square chamber
- AS-Master Rapid Thermal Processing / Rapid Thermal Chemical Vapor Deposition system.
- Jipelec JetFirst 300 300 mm RTP tool
- Zenith Series Far and Near - Up to one hour at 2000?C
- Annealsys DLI-CVD / DLI-ALD
- Second Hand Systems