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Annealsys manufactures systems for Rapid Thermal Processing and Chemical Vapor Deposition.
Annealsys offer additional process solutions with ALD machines from Cambridge NanoTech (USA), laboratory sputtering systems from Intercovamex (Mexico) and sputtering and plasma equiment from FHR (Germany)
Annealsys offer additional process solutions with ALD machines from Cambridge NanoTech (USA), laboratory sputtering systems from Intercovamex (Mexico) and sputtering and plasma equiment from FHR (Germany)
Versatile system for thin film deposition processes in small scale production and R&D for PVD.
Applications
FHR Anlagenbau GmbH has a long experience in physical vapour deposition based upon DC, RF magnetron sputtering and most advanced reactive bipolar & unipolar technologies as well as for evaporation. The range of products include cluster tools, in-line systems and roller coaters.
Specifications
Cluster tools are the standard for micro electronics or substrates similar to wafer. However their flexibility regarding different processes and substrate handling make cluster interesting for advanced R&D.
In-line solutions are the right answer for high productive depositions or large substrate sizes. FHR Anlagenbau GmbH offers vertical and horizontal type equipment. The equipment may be combined with different types of manual or automatic loading, different kinds of substrate pre-treatment like heating and etching.
FHR Anlagenbau GmbH manufactures roll or web coater for production and advanced product development. The substrate temperature may be controlled in a wide range to achieve different film properties.
FHR Anlagenbau GmbH has also know-how for advanced in-situ measurement tools and related on-line process control technology.
FHR also provide targets and target bonding service.
In-line solutions are the right answer for high productive depositions or large substrate sizes. FHR Anlagenbau GmbH offers vertical and horizontal type equipment. The equipment may be combined with different types of manual or automatic loading, different kinds of substrate pre-treatment like heating and etching.
FHR Anlagenbau GmbH manufactures roll or web coater for production and advanced product development. The substrate temperature may be controlled in a wide range to achieve different film properties.
FHR Anlagenbau GmbH has also know-how for advanced in-situ measurement tools and related on-line process control technology.
FHR also provide targets and target bonding service.
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Datasheet
Datasheet English