Description
Versatile system for thin film deposition processes in small scale production and R&D for PVD.
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Annealsys manufactures systems for Rapid Thermal Processing and Chemical Vapor Deposition.
Annealsys offer additional process solutions with ALD machines from Cambridge NanoTech (USA), laboratory sputtering systems from Intercovamex (Mexico) and sputtering and plasma equiment from FHR (Germany)
Annealsys offer additional process solutions with ALD machines from Cambridge NanoTech (USA), laboratory sputtering systems from Intercovamex (Mexico) and sputtering and plasma equiment from FHR (Germany)
FHR Anlagenbau GmbH has long years of experience in physical vapour deposition based upon DC, RF magnetron sputtering and most advanced reactive bipolar & unipolar technologies as well as for evaporation according to the state of the art.
