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Annealsys manufactures systems for Rapid Thermal Processing and Chemical Vapor Deposition.
Annealsys offer additional process solutions with ALD machines from Cambridge NanoTech (USA), laboratory sputtering systems from Intercovamex (Mexico) and sputtering and plasma equiment from FHR (Germany)
Annealsys offer additional process solutions with ALD machines from Cambridge NanoTech (USA), laboratory sputtering systems from Intercovamex (Mexico) and sputtering and plasma equiment from FHR (Germany)
Wide range of laboratory systems for dry and plasma etching processes.
Applications
FHR offers a wide range of laboratory systems for dry and plasma etching processes based either upon our modular components or as totally unique equipment solutions.
By this optimised solutions meeting requirements for handling, vacuum and process technology or the degree of automation fitting to the available budget can be realised.
By this optimised solutions meeting requirements for handling, vacuum and process technology or the degree of automation fitting to the available budget can be realised.
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