Annealsys manufactures systems for Rapid Thermal Processing and Chemical Vapor Deposition. Annealsys offer additional process solutions with ALD machines from Cambridge NanoTech (USA), laboratory sputtering systems from Intercovamex (Mexico) and sputtering and plasma equiment from FHR (Germany)
Cambridge Nanotech is the leading provider of Atomic Layer Deposition (ALD) solutions for research and industry. The Savannah with more than 150 systems installed worldwide is a reference for ALD process development. The Fiji system is a 200 mm plasma ALD system. Phoenix and Tahiti systems are available for production.