RTP / RTCVD processes

Rapid thermal process can be divided in three different classes of application: resident reaction, surface interaction, deposition (RTCVD)

Acronyms

  • RTP: Rapid Thermal Processing
  • RTA: Rapid Thermal Annealing
  • RTO: Rapid Thermal Oxidation
  • RTN: Rapid Thermal Nitridation
  • CVD: Chemical Vapor Deposition
  • RTCVD: Rapid Thermal Chemical Vapor Deposition
  • LPCVD: Low Pressure Chemical Vapor Deposition